제품소개

Analysis System

SEMICAPS 5000

Analysis System
개요
Laser Timing Probe(LTP),Scanning Optical Microscope(SOM), 
|Photon Emission Microscope(PEM) 및 
|Thermal Microscopy(THM)을 조합하여
|Wafer 을 분석 할 수 있는 최상의
|분석장비입니다.

특징

Features & Capabilities

  Elminate the need for sorting, dicing and repackaging of the wafer
•  Able to analyze at full tester speeds of up to 8 GHz
•  Land more than 10000 pins using a standard production probe card
•  High resolution motorized XYZ wafer stage with 0.1µm accuracy
•  Able to handle 200mm and 300mm wafers
•  ARSIL option: compatible with full thickness, unthinned wafer