제품소개

Analysis System

SEMICAPS 3000

Analysis System
개요
Wafer의 frontside 및 Backside 그리고 
|Wafer Parts/Packaged devices등의
|분석에 최적화된 분석장비입니다.
|(모든 ATE Platforms과 Dock가능)

특징

Features & Capabilities

•  Easily moved from Tester to Tester
•  Custom docking for all ATE platforms
•  High resolution stage with 0.5 μm repeatability
•  Option to use with an Aplanatic Refractive Solid Immersion Lens (ARSIL)
•  CAD Interface option
•  Compatible with Thermal Management Solutions
•  Microscope Techniques include a combination of:
•  Laser Timing Probe (LTP)
•  Scanning Optical Microscopy (SOM) with best sensitivity
•  static: TIVA, OBIRCH
•  dynamic: LADA, SDL
•  Photon Emission Microscopy (PEM) with various option for
•  InGaAs or Si-CCD Camera

•  Thermal Microscopy (THM) with InSb camera