제품소개
Coater
특징
1. 가볍고 작은 Size
2. 탁월한 확장성
3. 조작이 쉬운 TMP Pumping system
4. 다양한 Option
|
SPEC |
Pumping System SVC-700TMSG |
|
TMP & Rotary Pump |
67ℓ/sec(N₂) / 20ℓ/min(with automatic leaking system) |
|
Evacuation Operation |
Automatic |
|
Ultimate Pressure |
2X10-4Pa |
|
Utility Requirement |
Single Phase 100V 50/60Hz 1.5 kVA, 3P outlet |
|
Dimensions |
340(W) X 460(D) X 544(H)mm |
SPEC |
Power Supply for Evaporation SVC-7PS80 |
|
Heater Power Supply |
12V 45A / 7V 80A |
|
Dimensions |
340(W) X 410(D) X 205.5(H)mm |