제품소개
Coater
특징
1. Carbon 증착 전용 Coater로 열 Damage의 최소화
2. Arc 방전(Flash Type)방식 채용 및 Carbon 입자의 유동성 우수
3. 간단한 Carbon Rod Setting 및 증착 시 Carbon 봉 제거 작업이 필요 없음
4. Option Unit 추가로 Au, Pt, Pt-PD Sputtering Coating 가능
|
SPEC |
|
|
Carbon Holder & Electrode |
Cartridge type / One pair |
|
Number of Coatings & Coating Time |
1 to 19 time(s) / 0.3sec/1time |
|
Carbon Rod |
5mm dia Five pieces made by SANYU ELECTRON CO.,LTD |
|
Chamber Size |
160(dia.) X 160(depth)mm |
|
Current |
Max. 70A 12V |
|
Degree of vacuum |
4Pa |
|
Rotary pump |
Directly-connected rotary pump 100L/min |
| Dimensions and Weight | 400(W) X 980(D) X 580(H)mm, 85kg |