제품소개
Coater
특징
1. 전자현미경 시료를 전자동으로 간단히 작성
2. Preset 방식에 의한 막 두께 조정 가능
3. 간단한 조작 및 높은 재현성
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SPEC |
|
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Standard Target |
49mm dia./AuX1(for coating) |
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Sample Base |
70min dia(Height adjustment range - 15, 20, 60 mm) |
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Sputtering System |
DC Sputtering/Parallel-plate type |
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Film thickness system |
Auto preset(with digital-readout thickness monitor) |
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High Voltage Power Supply |
1kV/0~20mA |
|
Chamber Size |
120(dia.) x 120(depth)mm (Made of stainless steel) |
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Dimensions and Weight |
Main unit : 225(W) X 420(D) X 320(H)mm, 15kg RP : 300(W) X 160(D) X 200(H)mm, 9kg |
| Power Supply | Single Phase AC 100V 50/60Hz 10A |