제품소개

Analysis System

SEMICAPS 1100

Analysis System
개요
Wafer의 frontside 및 Backside 그리고 
|Wafer Parts/Packaged devices등의 분석에 
|최적화된 분석장비입니다.

특징

Features & Capabilities

•  Ultra-stable system compatible for probing FIB pads
•  Compatible with third-party probe stations, probe cards and manipulators
•  High resolution stage with 0.5 μm repeatability
•  Option to use with Aplanatic Refractive Solid Immersion Lens (ARSIL)
•  CAD interface option
•  Compatible with thermal management solutions
•  Microscope Techniques includes a combination of:
•  Laser Timing Probe (LTP)
•  Scanning Optical Microscopy (SOM) with best sensitivity
•  static: TIVA, OBIRCH
•  dynamic: LADA, SDL
•  Photon Emission Microscopy (PEM) with various options for
•  InGaAs or Si-CCD camera
•  Thermal Microscopy (THM) with InSb camera
•  Dual Column: NIR/Thermal