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Magnetron Cathode ¹æ½Ä SEM ¿ë ½Ã·áÁ¦ÀÛ¿ë COATER
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SC-701MC |
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¨ç ½Ã·á¿¡ ¹«¸®¸¦ ÁÖÁö¾Ê´Â Magnetron Cathode ä¿ë
¨è °íÈ¿À²ÀÇ Sputter¹æ½Ä¿¡ ÀÇÇØ °í¹èÀ²¿¡¼ÀÇ SEM °üÂû
¿¡µµ °ßµð´Â ½Ã·áÁ¦ÀÛÀÌ °¡´ÉÇÕ´Ï´Ù.
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¥õ2
inch Magnetron Cathode |
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Au Target
ºÎ¼Ó |
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Pre Set
¹æ½Ä. Digital Ç¥½Ã ¸· µÎ²² Monitor ºÎ¼Ó |
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Àü¸é Door
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Á÷°áÇü Rotary Pump: 20l/min (ÀÚµ¿ Leak) |
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º»Ã¼£º
225/420/320mm ¡¡RP: 300/160/200mm |
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º»Ã¼: 15kg
RP: 9kg |
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